SITE Services, Inc. is a manufacturer of automated wafer coating equipment for the global semiconductor industry. Founded in 1980, the company designs, manufactures and markets innovative equipment used in the semiconductor photolithography process.
In 25 years of business SITE has evolved into a designer and manufacturer of track products in two areas:
Tractrixand SpinBall compact spin tracks
ESVG (Enhanced SVG) track upgrades and systems.
In 1998, the first Tractrix (originally called the Millennium 2000) Spin Track was sold. SITE incorporated the best of what we know and do into this completely new track design. The Tractrix tool is small in footprint (19" x 66.5" typical) yet large in capability. Capable of processing wafers ranging in size from 2" to 200mm, it features robotic wafer handling, PC-based graphical user programming and touch screen control.
The SpinBall is a manual version of the Tractrix model and handles wafers, squares and pieces from 2" to 300mm. It features automated recipe control and dispense, has single or multiple spin modules and is perfect for R&D, university or pilot line production.
SITE's Enhanced SVG systems are completely improved (enhanced), affordable tracks of the venerable 81- and 86-style SVG design. SITE has upgraded the performance of these workhorses with its advanced spin and bake modules as well as other improvements. SITE modules yield better-than-original process uniformity. For less critical processes, SITE's Enhanced SVG tools are an economical alternative.
Given the popularity of the SVG track, beginning in 1989, SITE expanded its offerings to address the demand for repair services and module upgrades for 81- and 86-series tools. These SITE Enhanced SVG products include improved spin cups, drain systems, hot plates, sensor systems and other enhancements for these belted-carriage systems. In fact, SITE can (and does) build complete the 86-series tools from scratch.
Today you can still find SITE in the heart of the Silicon Valley. The company maintains its headquarters and factory in Santa Clara, California. SITE products and services are sold directly and through a network of representatives in North America, Europe and the Far East.
